NGL 학술대회

Program at a Glance

| 1st Day | Aug. 10.(Mon)

07:30-08:20

Registration

08:20-09:50

[PL1] Plenary Session 1 『Room 405 - 408』
Chair: 차병철 (Entegris)

Opening Remarks학술대회 개회사

(Organizing Committee Chair) Byoung Ho Lee, (OSK President) Donghyun Kim
Plenary Talk 1-1 Sarohan Park (SK hynix)
Plenary Talk 1-2 Jin Seok Heo (KLA)

09:50-10:10

Break

10:10-11:50

[SP1] Scientific Program 1 『Room 405 - 408』
Optical & EUV Lithography
Chair: 이상설 (포스텍), 김상진 (아주대)

OP & EUV 1. (Invited) Ted Liang (LASERTEC)
OP & EUV 2. (Invited) Brandon Holybee (xLight)
OP & EUV 3. (Invited) Sungmin Huh (ASML Korea)
OP & EUV 4. (Invited) Jeonghoon Lee (IMEC)

11:50-13:20

Lunch / Break

Nano Bridge: Student Mentoring Program 『Room TBD』

13:20-15:10

[SP2] Scientific Program 2 『Room 405 - 408』
Metrology & Inspection
Chair: 김욱래 (삼성전자)

MI 1. (Invited) Tianhan Wang (KLA)
MI 2. (Invited) Sylvia Lewis (Sigray)
MI 3. (Invited) Byungkyu Cha (Samsung Electronics)
MI 4. (Invited) Soyeon Chang (Seoul National Univ.)

15:10-15:30

Break

15:30-17:00

[PL2] Plenary Session 2 『Room 405-408』
Chair: 김병국 (ESOL)

Plenary Talk 2-1 Jason Kim (Applied Materials)
Plenary Talk 2-2 Keun Hee Bai (Samsung Electronics)

17:00-18:00

[SP3] Scientific Program 3 『Room 405 - 408』
Dry Etch
Chair: 염근영 (성균관대), 김용진 (전북대)

Etch 1. (Invited) Kwang-Ho Kwon (Korea Univ.)
Etch 2. (Invited) Doo Young Lee (AMAT)
Etch 3. (Invited) Heeyeop CHAE (Sungkyunkwan Univ.)

18:00-20:00

Poster Session 『Room 401 - 402』
Poster Presentation + Industrial Contribution (Networking Reception)
만찬, 만찬, Conference Dinner

| 2nd Day | Aug. 11. (Tue)

07:30-08:20

Registration

08:20-09:50

[PL3] Plenary Session 3 『Room 405 - 408』
Chair: 이상설 (포스텍)

Welcome Session조직위원장, 프로그램위원장

Plenary Talk 3-1 Vivek Bakshi (EUV Litho)
Plenary Talk 3-2 Chang Min Park (Samsung Electronics)

09:50-10:10

Break

10:10-10:40

Student Speed Talk
Chair: 김성환 (한양대)

10:40-11:40

[SP4] Scientific Program 4 『Room 405 - 408』
Computational Lithography
Chair: 양승훈 (삼성전자)

CL 1. (Invited) Bongkeun Kim (Samsung Electronics)
CL 2. (Invited) Wan Ho Kim (Siemens EDA)
CL 3. (Oral) Seohyun Kim (KAIST)

11:40-13:00

Lunch / Break

13:00-14:40

[SP5] Scientific Program 5 『Room 405 - 408』
Joint session Alternative Lithogrpahy + EUV & MI
Chair: 김명기 (고려대), 이상설 (포스텍)

AL 1. (Invited) Sunghwan Kim (Hanyang Univ.)
OP & EUV + AL 2. (Invited) Philip KS Kim (LG Electronics)
OP & EUV 5. (Invited) Jiho Kim (PAL)
MI 5. (Invited) Junho Yoo (Nexensor)
AL 3. (Invited) You Shin No (Konkuk Univ.)

14:40-14:50

Break

14:50-16:55

Special Program 『Room 405 - 408』
NGL Japan Session
Chair: 차병철 (Entegris)

NGL-J 1. (Invited) Satoshi Enomoto (Toyo Gosei)
NGL-J 2. (Invited) Takaharu Nagai (DNP)
NGL-J 3. (Invited) Daijiro Akagi (AGC)
NGL-J 4. (Invited) Isao Ichikawa (Lintec)
NGL-J 5. (Invited) Norifumi Hosoi (Tekscend Photomask) _ On-line

16:55-17:10

Break

17:10-18:30

[SP6] Scientific Program 6 『Room 405 - 408』
Patterning Materials

PM 1. (Invited) Roberto Fallica (IMEC) _ On-line
PM 2. (Invited) Ji-Hyun Jang (UNIST)
PM 3. (Invited) Hyeok Yun (KRISS)
PM 4. (Invited) Gayoung Kim (Inha Univ.)

18:30-18:40

Closing Session 『Room 405 - 408』
Best Student Paper Award Ceremony
Closing Remark

리모콘

Program at a Glance